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Guest
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 Posted: Thu Jul 31, 2008 4:02 pm Post subject: Sputtering of Cr film |
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Hi,
I am having issues with magnetron sputtering of Cr. The chamber and
the film seems to have coloration after depositing the film at 3 mTorr
and a DC power of 50-100 W. Since the Cr film should look like a nomal
metal (no color), I am looking to find solution to this issue. Also,
can anybody help me in understanding the drift in the manometer
pressure reading when the plasma is turned on for deposition?
I would appreciate any input.
thanks. |
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Kitty
Guest
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| Posted: Fri Aug 01, 2008 3:47 am Post subject: Re: Sputtering of Cr film |
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<lsudheendra@googlemail.com> wrote in message
news:77165ea7-e690-448f-86e5-f596e49405f5@25g2000hsx.googlegroups.com...
[quote]Hi,
I am having issues with magnetron sputtering of Cr. The chamber and
the film seems to have coloration after depositing the film at 3 mTorr
and a DC power of 50-100 W. Since the Cr film should look like a nomal
metal (no color), I am looking to find solution to this issue. Also,
can anybody help me in understanding the drift in the manometer
pressure reading when the plasma is turned on for deposition?
I would appreciate any input.
thanks.
[/quote]
I would check the purity of your sputtering gas as well as the base
pressure. If you have access to an RGA, use that prior to sputtering and
just after.
Kitty |
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Mark Thorson
Guest
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| Posted: Fri Aug 01, 2008 7:08 am Post subject: Re: Sputtering of Cr film |
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lsudheendra@googlemail.com wrote:
[quote]
I am having issues with magnetron sputtering of Cr. The chamber and
the film seems to have coloration after depositing the film at 3 mTorr
and a DC power of 50-100 W. Since the Cr film should look like a nomal
metal (no color), I am looking to find solution to this issue. Also,
can anybody help me in understanding the drift in the manometer
pressure reading when the plasma is turned on for deposition?
I would appreciate any input.
[/quote]
What purge gas are you using before pulling a vacuum? |
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